Dispatching in a Semiconductor Fab With Two-Stage Machine Dedication Characteristics
碩士 === 國立交通大學 === 工業工程與管理系所 === 92 === Machine-dedication is an essential feature in modern wafer manufacturing. With this feature, a wafer once processed by a dedicated-machine, in the remaining operations, should be processed by the particular machine. Some research has developed dispatching algor...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77086603590729480281 |