Application of Computational Intelligence to Optimal Mask Design for System-on-a-Chip Layout Automation
碩士 === 國立交通大學 === 資訊科學系所 === 92 === In this work, various rule-based and model-based OPC methods are investigated so that a trade off between speed and correctness is found. Accordingly, we propose a hybrid intelligent OPC system for obtaining both the benefits of rule-based and model-based methods,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2004
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17229926080953348256 |