Structural Design and Thermal Analysis of Electro-Thermal Microactuator
碩士 === 國立清華大學 === 動力機械工程學系 === 92 === An actuator is a component of the Micro-Electro-Mechanical System (MEMS). The ways to drive actuators include electrostatic driving, piezoelectricity driving, electromagnetic driving, electro-thermal driving and shape memory alloy. Electro-thermal actuators have...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2004
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/73259538021729303447 |