Study of Chemical Scrubber Technology for Toluene and PGME inSemiconductor Processes

碩士 === 國立雲林科技大學 === 環境與安全工程系碩士班 === 92 === The semiconductor and optical-electric industries manufacture use many chemical solvent, such as isopropyl alcohol (IPA), acetone. Notably, large amount of volatile organic compounds (VOCs) are released into atmosphere during manufacturing processes. Presen...

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Bibliographic Details
Main Authors: chang chieh, 鄭鎮杰
Other Authors: none
Format: Others
Language:zh-TW
Published: 2004
Online Access:http://ndltd.ncl.edu.tw/handle/57492055040407170679