Effect of Supercritical Drying on The Properties of Sol-Gel Derived ITO Powder, Targets and Sputter-Deposited Thin Films
碩士 === 長庚大學 === 化工與材料工程研究所 === 93 === The objectives of this research are to replace the drying and calcination processes in the traditional sol-gel method by supercritical carbon dioxide drying in the preparation of sol-gel derived ITO powders, targets as well as rf-sputtered ITO thin films and to...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06701460214658059485 |