Process Recipe Optimization in Copper CMP
碩士 === 中原大學 === 機械工程研究所 === 93 === ABSTRACT In order to accommodate the market trend and satisfy the demand of consumable electronic product, the major design houses tend to design a chip with high density and multiple working capabilities. Relatively, to reduce the development time and resolve the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81869539383762258104 |