The role of nitrogen in the formation carbon nanotubes by CVD.
碩士 === 中原大學 === 應用物理研究所 === 93 === Abstract Well-aligned carbon nanotubes(CNTs) were synthesized by thermal CVD. CH4 was chosen as our carbon source, Ni as our catalyst and Silicon, with buffer layer SiO2 or Si3N4, as our substrates. After the pretreatment of the substrate proceeded by NH3, CNTs wit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91254632320453788628 |