The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
碩士 === 輔仁大學 === 物理學系 === 93 === Ion sources play important roles in the process of thin film formation. It not only can use in assistant-depesition but also in etching ,so it has been used widely for a long time in industrial . Users develop other different type of Ion source by their asks and they...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63051873697416446704 |