The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode

碩士 === 輔仁大學 === 物理學系 === 93 === Ion sources play important roles in the process of thin film formation. It not only can use in assistant-depesition but also in etching ,so it has been used widely for a long time in industrial . Users develop other different type of Ion source by their asks and they...

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Main Authors:	Chin-Ching Chen, 陳錦慶
Other Authors:	Jin-Cherng Hsu
Format:	Others
Language:	zh-TW
Published:	2005
Online Access:	http://ndltd.ncl.edu.tw/handle/63051873697416446704

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spelling	ndltd-TW-093FJU001980142015-10-13T11:39:46Z http://ndltd.ncl.edu.tw/handle/63051873697416446704 The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode 改變陽極形狀與陰極陽極間距對end-Hall離子源離子電流密度之研究 Chin-Ching Chen 陳錦慶碩士輔仁大學物理學系 93 Ion sources play important roles in the process of thin film formation. It not only can use in assistant-depesition but also in etching ,so it has been used widely for a long time in industrial . Users develop other different type of Ion source by their asks and they have different operation principle in according to the needs they want. This chapter is description of broad-beam gridless end-Hall type ion source .This experiment will estimate ion current density after changing two different shape of anode and changing the distance between cathode and anode by faraday cup. The chapter are also descriptions of end-Hall type ion source , their background ,operation principle and operation conditions information. Jin-Cherng Hsu 徐進成 2005 學位論文 ; thesis 61 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 輔仁大學 === 物理學系 === 93 === Ion sources play important roles in the process of thin film formation. It not only can use in assistant-depesition but also in etching ,so it has been used widely for a long time in industrial . Users develop other different type of Ion source by their asks and they have different operation principle in according to the needs they want. This chapter is description of broad-beam gridless end-Hall type ion source .This experiment will estimate ion current density after changing two different shape of anode and changing the distance between cathode and anode by faraday cup. The chapter are also descriptions of end-Hall type ion source , their background ,operation principle and operation conditions information.
author2	Jin-Cherng Hsu
author_facet	Jin-Cherng Hsu Chin-Ching Chen 陳錦慶
author	Chin-Ching Chen 陳錦慶
spellingShingle	Chin-Ching Chen 陳錦慶 The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
author_sort	Chin-Ching Chen
title	The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
title_short	The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
title_full	The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
title_fullStr	The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
title_full_unstemmed	The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode
title_sort	study of ion-current-density distribution of end-hall type ion source operated by changing shape of anode and the distance between cathode and anode
publishDate	2005
url	http://ndltd.ncl.edu.tw/handle/63051873697416446704
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The study of ion-current-density distribution of end-Hall type ion source operated by changing shape of anode and the distance between cathode and anode

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