Preparation of High Temperature Transparent ITO/Polyimide Plastic Substrates

• Main Authors: Tung-Lin Li, 李東霖
• Other Authors: Lien-Chung Hsu
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/09239674130919131789

碩士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 93 === 　Two kinds of transparent polyimide precurors , poly(amic acid), were prepared from 4,4’-Hexafluoroisopropylidene diphthalic anhydride (6FDA), 3,3’-Diaminodiphenyl sulfone (3,3’DDS) and 4,4’-Diaminodi-cyclohexylmethane (4,4’MBCA). Subsequently, thermal cyclization of the poly(amic acid) precursors at 300℃ produced the corresponding polyimides. The inherent viscosities of the precursor polymers were 0.58~0.71 dL/g. The fluorinated polyimides had high glass transition temperatures. The structures of the precursor polymers and the fully cyclized polymers were characterized by FTIR and elemental analysis. The optical transmittance of these polyimide films were up to 86%. 　Transparent and conductive ITO were coated on the colorless polyimide films by RF magnetron sputtering. The ITO/PI films were annealed at nitrogen atmosphere. The XRD diffraction showed that the amorphous ITO phase transferred into crystalline phase as the annealing temperature increased. After heat treatment, the best resistivity was 4×10-4Ω-cm. The electron mobility and the carrier concentration were 21.8 cm2/V and 1.3x1025cm-3 respectively. The optical transmittance was over 82%.