Applying High G MEMS Accelerometer for Multi-layer Target Impact Signal Detection
碩士 === 國立成功大學 === 航空太空工程學系碩博士班 === 93 === Applying the MEMS process, the sensing modulus can be fabricated to measure the acceleration due to impact. We can fabricate poly-silicon strain gauge with piezo-resistive property, and also fabricate PZT with piezo-electric property by sol-gel method. We...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48073556194904026511 |