Electrical and Optical Properties of RF-sputtered Transparent Conducting ZnO Thin Films
碩士 === 國立交通大學 === 電子工程系所 === 93 === In recent years, sputter-deposited Al-doped ZnO (AZO) is an interesting transparent conducting oxide (TCO) material for application in optoelectronic devices. In this thesis, the physical, electrical, and optical properties of the AZO films prepared by the RF magn...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63039812307702538680 |