Fabrication of micrometer columns by micro-anode guided eletroplating

• Main Authors: Jia-Hong Jeng, 鄭家宏
• Other Authors: Jing-Chie Lin
• Format: Others
• Language: zh-TW
• Published: 2005
• Online Access: http://ndltd.ncl.edu.tw/handle/64916830272593269033

碩士 === 國立中央大學 === 機械工程研究所 === 93 === Abstract Micro-column with the composition of nickel-copper alloy was fabricated by micro anode guided electroplating (MAGE) method. There are two solutions were used (sulfate and citrate solution) for discussing the practicability of fabricating the micrometer Ni-Cu alloy column. In experiment, we change the bias between anode and cathode, the concentration of copper sulfate in solution, in order to discussing the variation of the proportion of nickel to copper and the surface morphology of micro Ni-Cu alloy column by SEM. In the citrate solution, we can fabricate a uniform micro Ni-Cu alloy column at the applied voltage was 4.2V and the gap between anode with cathode is 10μm. Changing the concentration of copper sulfate in solution is the most effect of the surface morphology and the structure of the micro-alloy column. As the concentration of copper sulfate in solution is 4mM, the surface morphology of micro Ni-Cu alloy column is more smoothly and the structure is more solidly. When the concentration of copper sulfate is increasing to 8mM, the deposits on the column surface is becoming to roughly deposit and the diameter of column uniformly. The proportion of nickel to copper is increasing from 75/25、80/20、83/17 to 87/23 with the in creasing of the applied voltage between the anode and cathode, but the proportion of nickel to copper is decreasing from 75/25、59/41 to 49/51 with the increasing of the concentration of copper sulfate in bath. We did fabricated the micro Ni-Cu alloy column and successfully make use of measuring temperature.