A neural-network approach for wafer defects pattern classification

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 93 === Nowadays, the procedures of semiconductor manufacturing have become more and more sophisticated. Though highly automated facilities are used to process the complex manufacturing steps in the near particle free environment, the yield loss is still unavoidable....

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Bibliographic Details
Main Authors: Ching-Ming Wu, 吳璟旻
Other Authors: Fei-Long Chen
Format: Others
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/44586708557044604231