The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions

碩士 === 國立臺灣大學 === 化學工程學研究所 === 93 === In this study, we focused on the aluminum electrochemical characteristics and etching behaviors in the phosphoric acid solution, nitric acid and the phosphoric-nitric acid solution, respectively. In the experiments, we measured the etching rates by electrochemic...

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Main Authors: Wen-Hsiung Lu, 呂文雄
Other Authors: Shi-Chern Yen
Format: Others
Language:zh-TW
Published: 2005
Online Access:http://ndltd.ncl.edu.tw/handle/29711547356867965792
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spelling ndltd-TW-093NTU050630112015-12-21T04:04:53Z http://ndltd.ncl.edu.tw/handle/29711547356867965792 The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions 鋁在磷酸溶液中之電化學行為及其蝕刻之研究 Wen-Hsiung Lu 呂文雄 碩士 國立臺灣大學 化學工程學研究所 93 In this study, we focused on the aluminum electrochemical characteristics and etching behaviors in the phosphoric acid solution, nitric acid and the phosphoric-nitric acid solution, respectively. In the experiments, we measured the etching rates by electrochemical polarization and the interface phenomena by Electrochemical Impedance Spectra (EIS) technique. We also analyzed the surfaces which were etched by different etchants with XPS. The results showed that the etching behaviors in the phosphoric acid solutions were discussed with three concentration regions: in the low concentration region (< 3M), the surface alumina thickness decreased rapidly; in the middle concentration region (3M~7M), the thickness reached a steady state thickness and kept a constant value; in the high concentration region (>7M), the alumina thickness decreased again and became a very thin alumina film on the surface. Because the alumina on the surface had two different structures, the inner part is dense alumina and the outer part is porous alumina. They showed various etching behaviors in the three concentration regions. We also found out that nitric acid could oxidize the aluminum surface. That is why the etching rate increased rapidly in the high concentration region. In the high phosphoric acid concentration region, the alumina layer became very thin and H+ can etch aluminum to generate the hydrogen bubbles. This is why the bubbles generation in the low phosphoric acid concentration is slow and in the high phosphoric acid concentration region, it is fast. Finally, we found out the acetic acid is an organic acid which decreased surface resistance and reduced the surface roughness. Shi-Chern Yen 顏溪成 2005 學位論文 ; thesis 153 zh-TW
collection NDLTD
language zh-TW
format Others
sources NDLTD
description 碩士 === 國立臺灣大學 === 化學工程學研究所 === 93 === In this study, we focused on the aluminum electrochemical characteristics and etching behaviors in the phosphoric acid solution, nitric acid and the phosphoric-nitric acid solution, respectively. In the experiments, we measured the etching rates by electrochemical polarization and the interface phenomena by Electrochemical Impedance Spectra (EIS) technique. We also analyzed the surfaces which were etched by different etchants with XPS. The results showed that the etching behaviors in the phosphoric acid solutions were discussed with three concentration regions: in the low concentration region (< 3M), the surface alumina thickness decreased rapidly; in the middle concentration region (3M~7M), the thickness reached a steady state thickness and kept a constant value; in the high concentration region (>7M), the alumina thickness decreased again and became a very thin alumina film on the surface. Because the alumina on the surface had two different structures, the inner part is dense alumina and the outer part is porous alumina. They showed various etching behaviors in the three concentration regions. We also found out that nitric acid could oxidize the aluminum surface. That is why the etching rate increased rapidly in the high concentration region. In the high phosphoric acid concentration region, the alumina layer became very thin and H+ can etch aluminum to generate the hydrogen bubbles. This is why the bubbles generation in the low phosphoric acid concentration is slow and in the high phosphoric acid concentration region, it is fast. Finally, we found out the acetic acid is an organic acid which decreased surface resistance and reduced the surface roughness.
author2 Shi-Chern Yen
author_facet Shi-Chern Yen
Wen-Hsiung Lu
呂文雄
author Wen-Hsiung Lu
呂文雄
spellingShingle Wen-Hsiung Lu
呂文雄
The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
author_sort Wen-Hsiung Lu
title The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
title_short The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
title_full The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
title_fullStr The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
title_full_unstemmed The study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
title_sort study of electrochemical characteristics and etching behaviors in phosphoric acid solutions
publishDate 2005
url http://ndltd.ncl.edu.tw/handle/29711547356867965792
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