Virtual Metrology of Semiconductor Thickness Using Data Mining and Neural Network
碩士 === 中華大學 === 資訊工程學系碩士班 === 94 === Semiconductor enters the age of NANO as time goes by; the concept of Advanced Process Control（APC）has gradually been used into semiconductor manufactories. Nowadays the Run-to-Run（R2R）and the Fault Detection and Classification（FDC）systems of Advanced Process Cont...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52986646226504629882 |