Study of the laser assisted mechanical nano-polishing

• Main Authors: Kuo-Hao Lu, 呂國豪
• Other Authors: Jehnming Lin
• Format: Others
• Language: zh-TW
• Published: 2006
• Online Access: http://ndltd.ncl.edu.tw/handle/82363118025096760729

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 94 === Abstract The objective of this thesis is to study the laser-assisted nanopolishing phenomena of aluminum substrate with nickel particle by molecular dynamics theory, and the results are compared with experiments. The Gear’s fifth order predictor-corrector algorithms is adapted to calculate the positions, velocities, and accelerations of atoms under various displacement condition while the interactions of atoms are dealt with Verlet’s neighbor lists and Morse’s potential. The numerical simulation is to study the force of nanopolishing and temperature distribution of substrate with various laser energy densities, and investigate the mechanism of nanopolishing. In the numerical simulations, it can be found：(1) The nickel particle will remove aluminum atoms of substrate during the polishing processes. (2) The laser energy will increase the temperature of workpiece surface. The heating effect can reduce the local heat affected zone. (3) The force between particle and workpiece is decreased with increasing temperature by laser irradiation. (4) The laser can improve the surface quality of workpiece.