| Summary: | 碩士 === 國立高雄第一科技大學 === 機械與自動化工程所 === 94 === ABSTRACT
This research uses spiral microstructures to measure the residual stresses of the thin
films for MEMS devices. In order to understand the effectiveness of the residual
stresses on spiral microstructures, the formulation is derived and then the theoretical
analysis is conducted. The results conclude that mean normal stresses would stretch or
compress the spiral microstructures, and that strain or stress gradients would change the
height and diameter of the microstructures and also result in the angular rotation of the
microstructure’s end point. These geometric changes are utilized to determine the
residual mean normal stresses and gradient stresses. In addition, the finite element
analysis is also conducted to verify the results. To minimize the measurement errors,
the Taguchi method is used to optimize the dimensions of the spiral
microstructures. Finally, experiments are conducted to verify the
theoretical results
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