The Design and Fabrication of CMOS MEMS Mass Sensor Using Cantilever Beam Structure
碩士 === 國立清華大學 === 電子工程研究所 === 94 === In this paper, we present the design, fabrication, and characterization of CMOS micromachined cantilevers for mass sensing in the femto-gram range. The cantilevers consisting of multiple metal and dielectric layers are fabricated after completion of the conventio...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65454301643304475786 |