Fabrication of a Thin Film Bulk Acoustic Wave Resonator on a Porous Substrate
碩士 === 國立臺灣科技大學 === 材料科技研究所 === 93 === This study uses perfect C-axis preferred orientated zinc oxide as a piezoelectricity material and porous silica substrate as air gap for thin film bulk acoustic wave resonator. Structure of the resonator is composed of upper electrode / zinc oxide piezoelectr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2005
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| Online Access: | http://ndltd.ncl.edu.tw/handle/70111519688346535954 |