The study and analysis of nano-scale pores in porous silicon material

碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 94 === In this study, the porous silicon (PS) films are fabricated by electrochemical anodization method. Various experimental parameters, such as etching current density, etching time and HF concentration, are investigated. Photoluminescence (PL), scanning electro...

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Bibliographic Details
Main Authors: Chen Wei Lun, 陳威綸
Other Authors: 林嘉洤
Format: Others
Language:zh-TW
Published: 2006
Online Access:http://ndltd.ncl.edu.tw/handle/98465035340404295864