The study and analysis of nano-scale pores in porous silicon material
碩士 === 中國文化大學 === 材料科學與奈米科技研究所 === 94 === In this study, the porous silicon (PS) films are fabricated by electrochemical anodization method. Various experimental parameters, such as etching current density, etching time and HF concentration, are investigated. Photoluminescence (PL), scanning electro...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98465035340404295864 |