The Hopfield Neural Networks for Automatic Semiconductor Wafer Defect Inspection
碩士 === 國立雲林科技大學 === 資訊工程研究所 === 94 === The occurrence of defect on a wafer may result in losing the yield ratio. The defective regions were usually identified through visual judgment with the aid of a scanning electron microscope. Dozens of people visually check wafers and hand-mark their defective...
Main Authors: | Si-yan Lin, 林思延 |
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Other Authors: | Chung-Yu Chang |
Format: | Others |
Language: | en_US |
Published: |
2006
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Online Access: | http://ndltd.ncl.edu.tw/handle/15621961912555308664 |
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