Effects of Passivation Layers on Characteristics of GaN-Based Light-Emitting Diodes
碩士 === 國立中興大學 === 精密工程學系所 === 95 === Dielectric thin-film materials such as SiNx and SiO2 are widely used in the semiconductor industry. In this thesis, the dielectric passivation layers deposited by plasma-enhanced chemical vapor deposition were attempted to protect the GaN light-emitting diodes (L...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/70023580408584659087 |