Tribological properties of mixed carbon source DLC films with nitrogen dopant
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === The main purpose of this study is to research the tribological properties and cutting performance of a-C:H:N coatings prepared by sputtering graphite and Zirconium targets with a medium frequency Twin magnetron sputtering and unbalanced magnetron sputtering hy...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79087536742815578499 |