Processes and properties of the horizontally-oriented SWNTs networks deposited by the buffer-layer assisted MPCVD
碩士 === 國立交通大學 === 材料科學與工程系所 === 95 === In this work,the horizontally oriented single-walled carbon nanotubes (SWNTs) networks deposited directly on Si wafer substrate by the buffer layer-assisted microwave plasma chemical vapor deposition (MPCVD) method were successfully developed, using CH4, C2H2 a...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/04682610808260307057 |