Studying of transparent conductive Al-doped Zinc Oxide thin films prepared by Rf magnetron cosputtering system
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === In this study, aluminum-doped zinc oxide thin films were deposited on Sapphire by Rf magnetron co-sputter system. First of all, we were used ZnO-Al2O3 2wt.% alloy target, and deposited aluminum-doped zinc oxide thin films to find the optimum deposition condi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/f233eb |