Aluminum-nitride codoped zinc oxide films prepared using a radio-frequency magnetron cosputtering system

碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 95 === Al-N codoped zinc oxide films were prepared using a radio-frequency magnetron cosputtering system using AlN and ZnO targets at room temperature. The as-deposited cosputtered films at various theoretical atomic ratios [Al / (Al + Zn) at.%] showed n-type condu...

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Bibliographic Details
Main Authors: Chia-Sheng Sheu, 許加昇
Other Authors: Day-Shan Liu
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/629pgy