Growth non-polar ZnO Epitaxy on R-plane Sapphire
碩士 === 義守大學 === 材料科學與工程學系碩士班 === 96 === In this study, non-polar ZnO epitaxial films were grown by metalorganic chemical vapor deposition(MOCVD). ZnO films grown along C-plane (0 0 0 1) direction, In this case, electrostatic field is generated along the growth direction and it results in spontaneous...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/86441343967630663203 |