| Summary: | 碩士 === 國立中興大學 === 機械工程學系所 === 96 === Abstract
The optical configuration of the traditional microscopic measurement is set up on the optical table by adjustable fixture and uses fixtures to fine-tune the tilt and position of the lens for acquiring clear interference fringes. The purpose of this study was to design a set of simple and less-complicated microscopic interferometer. The motivation of the design was to simplify the optical path system, reduce the adjusting procedure, and shorten the operation time. In the beginning phase of the design, we considered the measuring precision of the optical path configuration itself. In order to avoid lowering the measuring precision by simplifying the system , the optical configuration of the Linnik type was chosen as the key frame of the interferometer design.
In the preliminary design, the design process was divided into three stages. The first stage was to use the nested charts and figures to work out the designing and manufacturing flows of the interferometer. In the second stage, we proceeded to design and manufacture the interferometer according to the specifications formulated by the figure. In the third stage, we reviewed the defects and problems by means of experiments and redrafted the design principles to implement the processes of modification, designing and manufacturing. Finally, by repeating modifications and inspections, we completed a set of simple, economic and practical Linnik microscopic interferometer.
The experimental results show that the modified Linnik microscopic interferometer could not only reduce the tuning procedures of measuring and shorten the operation time, but also enhance the measuring quality and precision.
|
|---|
