Designing a novel paddle cantilever beam in measurement of the mechanical behavior of copper thin films
碩士 === 國立中興大學 === 精密工程學系所 === 96 === In this thesis ,a new technique for studying the mechanical behavior of nano-scale thin metal films on silicon substrate is presented. The test structure was designed on this novel “paddle” cantilever beam specimens with dimensions as few hundred nanometers to le...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/60140093193839524668 |