Study of Supercritical Fluid Technology for Low-Temperature Fabrication of Semiconductor Devices
博士 === 國立清華大學 === 電子工程研究所 === 96 === Supercritical fluid owns the gas-like and liquid-like properties to extract matter from micro- and nano-structure without damage. In this paper, firstly, we apply the supercritical fluid technology to remove the moisture absorbed in carbon nanotube emitters. From...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37006742255072129328 |