Utilizing nanosphere lithography by convective self-assembly method for fabrication of periodic patterned sapphire substrate
碩士 === 國立臺灣大學 === 光電工程學研究所 === 96 === As electronic devices become smaller, the traditional photolithography technology is not available to fabricate nanometer-scale structure. Nevertheless, a new technology called nanolithography is growing up nowadays. Nanostructures fabricated by nanomasks, such...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71028617098742657983 |