Gradient Layer Deposition of Composite Film On SKH9 by R.F. Magnetron Sputtering
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === For single layer is limited by the performance of material characters, less application can be done. For overcome this drawback, more and more research on multi-layer deposition were studied recently. By using the high hardness, high thermal conductivity and lo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/7f3pf2 |