LOW-TEMPERATURE FABRICATION METHOD OF CARBON NANOTUBES-BASED GAS SENSOR
碩士 === 國立臺北科技大學 === 機電整合研究所 === 96 === Low temperature processes are the better way to integrate CNTs with CMOS chips into array-type gas sensors. The metal used in CMOS is almost Al-Si-Cu alloy, which make the sustainable temperature of CMOS structures be in the range of 400-500℃. For this goal, de...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/yc74n7 |