Studies of Airflow Uniformity and Pollutant Dispersion in a TFT-LCD Clean Room

• Main Authors: Chao-Wen Chen, 陳昭文
• Other Authors: An-Shik Yang
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/pzk96d

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 96 === As the progress and development of production technology, high-tech industry to process more and more stringent environmental requirements for the production of gas and chemicals needed to become more complicated, while consumption increasingly great, and so control products come in contact with the the atmosphere, cleanliness and pollutant concentration, so that products with the staff of the environment in a good space, production, manufacturing is even more urgent, ran all the clean rooms which are all aimed to suspended particles in the air and the pollutants removed Therefore, the understanding of particles in the air campaign and the distribution of clean room design and planning is very important. In this study, ethanol (Alcohol) for the pollutant gases, analog panel machine tube manufacturing process the gas leakage Road when the impact of pollution, clean rooms, clean rooms in the region with the release of ethanol gas at the same time more than one handheld VOC (volatile organic compounds ) detector in the clean room for several different positions measurement solutions. Study found that clean indoor If there is gas leakage, with the circulating gas flow mixture of rapid and uniform concentration, but the overall concentrations averaged (from 60000ppb quickly dropped to 3000 ~ 4000ppb), follow-up to the dilution required to rely on foreign gas supplies, the overall concentration was gradually reduced gradually (from 3000ppb slow down to 300 ~ 400ppb), contamination by diffusion of gas required results of this study for the possible impact of pollution on the analysis of clean rooms, will help the fabric-point gas monitors and the development of clean room micro-pollution control strategy. The results analysis, the concentration of contamination occurs, the leak source higher concentrations of the surrounding environment, the first half block concentration changes can be observed a significant (by 60000ppb ~ 4000ppb), the latter half of block because of environmental dilution, close to return air duct regions are changing very small (by 5000ppb ~ 1000ppb), so the installation location of gas detectors should be placed close to the wind machine at the next pipe, once the pipeline leak, monitor can be an immediate response, to quickly deal with the emergency response effect of making it work staff the timeliness of an immediate escape.