Performance prediction of MES system - case study on DRAM wafer fabrication

碩士 === 長庚大學 === 資訊管理學研究所 === 97 === DRAM wafer manufacturing by Manufacturing Execution System. MES system will stop service for hardware upgrade or replacement when the low performance. MES stop service for hardware upgrade not only increase the cost of hardware payout but also reduce the productio...

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Bibliographic Details
Main Authors: KungYu Hsiao, 蕭光裕
Other Authors: C. H. Chen
Format: Others
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/27241417066628064239