Mechanical Properties Measurement of Nano-Scale Aluminum Films on the Novel Paddle Cantilever Beams Using Laser Deflection

• Main Authors: Ya-Chi Cheng, 鄭雅琪
• Other Authors: Kuan-Jung Chung
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/47962115320152240914

碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In this paper the test microstructure was designed the triangular cantilever beam and fabricated by the standard C-MOS processes, which can improve stress distribution non-uniform problem and the thickness regime of deposited metal thin film on its surface could reduce to several nanometers. In order to reduce the measure error and calculation complex due to the contact force (like indenter), the driving system was used electrostatic force to making the paddle cantilever beam bend and the deflection of paddle cantilever beam due to the electrostatic force was measured by a point laser reflected from paddle plate into the Position Sensing Detector (PSD). According to the displacement of the laser point on the PSD using a simple geometry calculation the deflection of paddle cantilever will be obtained. Than, we figure out the stress versus the stain and the Young’s Modulus of the thin films. It presents the mechanical properties of thin films.