Mechanical Properties Measurement of Nano-Scale Aluminum Films on the Novel Paddle Cantilever Beams Using Laser Deflection
碩士 === 國立彰化師範大學 === 機電工程學系 === 97 === In this paper the test microstructure was designed the triangular cantilever beam and fabricated by the standard C-MOS processes, which can improve stress distribution non-uniform problem and the thickness regime of deposited metal thin film on its surface could...
Main Authors: | Ya-Chi Cheng, 鄭雅琪 |
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Other Authors: | Kuan-Jung Chung |
Format: | Others |
Language: | zh-TW |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/47962115320152240914 |
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