Thermal Actuated Solid Tunable Micro Lens
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 97 === Rapid development MOEMS (Micro Opto-Electro Mechanical System) can be applied to variety fields, including optical communication, imaging, optical storage, industrial detection, and bio-detection. In response to the requirement of system miniaturization, opti...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/30266312167060304872 |