Thermal Actuated Solid Tunable Micro Lens

• Main Authors: Lee, SzYuan, 李思源
• Other Authors: Fang, Weileun
• Format: Others
• Language: zh-TW
• Published: 2009
• Online Access: http://ndltd.ncl.edu.tw/handle/30266312167060304872

博士 === 國立清華大學 === 奈米工程與微系統研究所 === 97 === Rapid development MOEMS (Micro Opto-Electro Mechanical System) can be applied to variety fields, including optical communication, imaging, optical storage, industrial detection, and bio-detection. In response to the requirement of system miniaturization, optical component with tunability is favored than traditional moveable lens set. Currently, all designs of tunable lens are composed of two material states. That leads to complicated packaging issues which are impediment to system integration. The newly developed solid-state thermal actuated tunable lens is free from those problems and seems promising to verity applications. It employs thermal expansion to deform PDMS lens surface which further leads to focal length change. No moving parts, no special packing needs and friendly manufacture process make it being flexible to integrate with other optical components. In this study, we tried to further develop its merit. Three sets of experiment are designed and carried out. The first one simulated the actuating mechanism and corresponding optical behavior. Actual components are implemented and measured. The result verified the focal length tuning ability. A further measurement of MTF was also accomplished to understand its optical performance variation with respect to the focal length tuning. To demonstrate the easy integration of this tunable lens and optical components, different type of Fresnel lenses were integrated with tunable lens in the form of cemented doublet. Little extra effort was required to accomplish the integration, thanks to the friendly fabrication process of tunable lens. The optical functions of doublet were also verified successfully. In the third set of experiment, the flexibility of the tunable lens is demonstrated. The inner shape of conduction ring was designed to be ellipse which may leads to asymmetrical deformation at expansion and induce astigmatism. Simulation and optical measurement are in good agreement. In summary, the experiments demonstrate the flexibility and potential of solid-state thermal actuated tunable lens. It worth further study and have good chance to come close to the goal of efficient and reliable tunable device.