Fabrication of Micron and Submicron Compound Structures by Combining Interference Lithography and Nanoimprint Lithography
碩士 === 國立臺灣大學 === 光電工程學研究所 === 97 === It has been reported that the two dimensional sub-wavelength periodic structures would result in excellent broadband anti-reflection with wide incident angles. Though this technique is not widely used to replace traditional thin film coating presently, it is ex-...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2009
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Online Access: | http://ndltd.ncl.edu.tw/handle/15234171222560412024 |