n-MOSFET微型應力感測計之特性研究
碩士 === 國防大學理工學院 === 機械工程碩士班 === 98 === In this thesis, the MOSFET with 1m channel width and 0.15m channel length was studied to be a stress sensor. Under mechanical, thermal, and thermo-mechanical coupling effects, parameters of the MOSFET devices can be extracted based on linear relationships be...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/93761402500780265168 |