The study of high speed micro-drilling performance and hole quality of diamond-like carbon coatings by doping with zirconium
碩士 === 建國科技大學 === 自動化工程系暨機電光系統研究所 === 98 === The main purpose of this study is to research the tribological properties and cutting performance of a-C:H coatings prepared by sputtering graphite and Zirconium targets with unbalanced magnetron sputtering system. It contains three stages in the study. I...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/09505634286955911298 |