Study on Amorphous Indium Gallium Zinc Oxide Thin-Film Transistors
碩士 === 明新科技大學 === 電子工程研究所 === 99 === In this research, Indium Gallium Zinc Oxide (IGZO) thin film transistors deposited by DC sputtering system with staggered and coplanar structure. The electrical properties of thickness and material effect were studied by changing the thickness of gate insulator a...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03653353819844720025 |