Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor
碩士 === 國立交通大學 === 電子工程系所 === 98 === This thesis presented a fully CMOS compatible process to implement NiFe (68 at%. Ni and 32 at.% Fe) –AAO nanocomposite as magnetic core material for on-chip spiral inductor fabrication. The NiFe nanorod arrays with 60~70 nm diameter using DC electroplated are depo...
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2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67510651712976525650 |
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ndltd-TW-098NCTU54280212015-10-13T15:42:34Z http://ndltd.ncl.edu.tw/handle/67510651712976525650 Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor 鎳鐵與氧化鋁奈米複合材料的合成及製程開發使螺旋電感的性能增強 Hsu, Hsin-Fu 許欣富 碩士 國立交通大學 電子工程系所 98 This thesis presented a fully CMOS compatible process to implement NiFe (68 at%. Ni and 32 at.% Fe) –AAO nanocomposite as magnetic core material for on-chip spiral inductor fabrication. The NiFe nanorod arrays with 60~70 nm diameter using DC electroplated are deposited and electrically isolated in anodic alumina oxide (AAO) template on silicon substrate. Experimental results show that the spiral inductor of 4.5 turns using NiFe-AAO nanocomposite magnetic core can have 23% inductance enhancement than that of inductor without the core up to 1 GHz. Cheng, Yu-Ting 鄭裕庭 2009 學位論文 ; thesis 24 en_US |
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NDLTD |
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en_US |
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Others
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碩士 === 國立交通大學 === 電子工程系所 === 98 === This thesis presented a fully CMOS compatible process to implement NiFe (68 at%. Ni and 32 at.% Fe) –AAO nanocomposite as magnetic core material for on-chip spiral inductor fabrication. The NiFe nanorod arrays with 60~70 nm diameter using DC electroplated are deposited and electrically isolated in anodic alumina oxide (AAO) template on silicon substrate. Experimental results show that the spiral inductor of 4.5 turns using NiFe-AAO nanocomposite magnetic core can have 23% inductance enhancement than that of inductor without the core up to 1 GHz.
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| author2 |
Cheng, Yu-Ting |
| author_facet |
Cheng, Yu-Ting Hsu, Hsin-Fu 許欣富 |
| author |
Hsu, Hsin-Fu 許欣富 |
| spellingShingle |
Hsu, Hsin-Fu 許欣富 Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| author_sort |
Hsu, Hsin-Fu |
| title |
Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| title_short |
Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| title_full |
Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| title_fullStr |
Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| title_full_unstemmed |
Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor |
| title_sort |
material synthesis and process development of nife-aao nanocomposite for performance enhancement of on-chip spiral inductor |
| publishDate |
2009 |
| url |
http://ndltd.ncl.edu.tw/handle/67510651712976525650 |
| work_keys_str_mv |
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