Fabrication of Quartz Nanoneedles by Using Cr Thin Films as Wet Etching Masks
碩士 === 國立中央大學 === 機械工程研究所 === 98 === This paper presents a study of the fabrication of quartz nanoneedles by wet etching. Using Chromium thin films as etching masks, the quartz nanoneedles are fabricated on Z-cut wafers with different etching time. The lengths and shapes of nanoneedles are observed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02800452392588087152 |