Effect of various annealing processes on TiO2 thin films by RF magnetion sputtering
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Photocatalytic properties of various thicknesses of titanium dioxide (TiO2) thin films on the glass and polycarbonate (PC) substrates deposited by sputtering are studied. Effects of 450℃ furnace and laser annealing on the photocatalytic properties of the TiO...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05058595517095124351 |