Parametric Optimization of Metal Word Line Tungsten Deposition Process by Using Taguchi Method
碩士 === 逢甲大學 === 資訊電機工程碩士在職專班 === 99 === This study has successfully applied the Taguchi method by using data produced by L12 orthogonal array experiment; and by applying Taguchi''s analysis of variance in the film deposition process of the tungsten metal word line (mWL W DEP-Meta...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58062788004606669169 |