Study on the mechanical behavior of thin metal film using dynamic response of paddle cantilever beam
碩士 === 國立中興大學 === 精密工程學系所 === 99 === Over this experiment, we studied the dynamic response behavior and material mechanical properties of metal thin films by combining the capacitance measurement method and the static electric drive system, installing both into the vacuum chamber, The film carrier (...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14196557402448810427 |